Electron Beam Evaporator (EBE)
Specifications
The CreaTec Electron Beam Evaporator is designed for evaporation of low vapor pressure materials - either from wire, rod or crucible - under true UHV conditions. A high precision control unit is used for the instantaneous variation of all necessary parameters. The EBE-C version is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardment to a maximum temperature to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source.
Options:
- EBE - Standard
- EBE - Carbon
- EBE - AX
- EBE - Linear
TYPE | EBE-ST | EBE-C | EBE-AX | EBE-L |
TEMPERATURE RANGE | up to 2700 °C | 200 - 2200 °C | up to 2700 °C | up to 2700 °C |
HEATING SYSTEM | e-beam heating bombardment | self-supported wire filament | e-beam bombardment | wire filment | ||
MAX. POWER | 0,3 kW | 1,7 kW | 4 kW | 6 kW |
FLANGE SIZE | DN 40| 63 (others on request) | DN 63 | 100 (others on request) | DN 160 | 200 | |
EVAPORATION FROM | rod or 0,8 cc crucible | pyrolitic graphite rod | 4/5 cc crucible | 7/15 cc crucible |
MAX. VOLTAGE TARGET | 1 kV | 1,5 kV | 8 kV | 10 kV |
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