EBE - Standard (EBE-ST)

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Specifications

The EBE-ST (Electron Beam Evaporator - Standard) is designed for use in a MBE system for evaporation of various materials with low vapor pressure. The heating of the material is performed by electron beam bombardment. Due to the evaporated source material there can be used either a crucible, where the source material is filled in, or the source material is shaped like a rod, from which the material sublimates by heating with electron bombardment.

Options:
  • Unit for vacuum isolation
  • Filament kit

 

TYPE EBE-ST
TEMPERATURE RANGE up to 2700 °C
HEATING SYSTEM e-beam heating bombardment | self-supported wire filament
BAKE-OUT TEMPERATURE 200 °C
FLANGE SIZE DN 40 | 63 (others on request)
MAX. OUTER DIAMETER 38 mm (others on request)
MIN. UHV LENGTH 180 mm
EVAPORATION FROM rod or 0,8 cc crucible
POWER SUPPLY EBE-PS
MAX. VOLTAGE TARGET 1 kV
MAX. EMISSION CURRENT 100 mA

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