EBE - Carbon (EBE-C)
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Specifications
The EBE-C (Electron Beam Evaporator - Carbon) is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardement to a maximum temperature of 2000°C to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.
Options:
- Unit for vacuum isolation
- Filament kit
TYPE | EBE-C |
TEMPERATURE RANGE | up to 2300 °C |
HEATING SYSTEM | e-beam heating bombardment | self-supported wire filament |
BAKE-OUT TEMPERATURE | 200 °C |
FLANGE SIZE | DN 40 | 63 (others on request) |
MAX. OUTER DIAMETER | 38 mm (others on request) |
MIN. UHV LENGTH | 180 mm |
EVAPORATION FROM | rod |
POWER SUPPLY | EBE-C-PS |
MAX. VOLTAGE TARGET | up to 3 kV |
MAX. EMISSION CURRENT | 300 mA |
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