EBE - Carbon (EBE-C)

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Specifications

The EBE-C (Electron Beam Evaporator - Carbon) is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardement to a maximum temperature of 2000°C to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.

Options:
  • Unit for vacuum isolation
  • Filament kit

 

TYPE EBE-C
TEMPERATURE RANGE up to 2300 °C
HEATING SYSTEM e-beam heating bombardment | self-supported wire filament
BAKE-OUT TEMPERATURE 200 °C
FLANGE SIZE DN 40 | 63 (others on request)
MAX. OUTER DIAMETER 38 mm (others on request)
MIN. UHV LENGTH 180 mm
EVAPORATION FROM rod
POWER SUPPLY EBE-C-PS
MAX. VOLTAGE TARGET up to 3 kV
MAX. EMISSION CURRENT 300 mA

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