EBE - Carbon (EBE-C)
Specifications
The EBE-C (Electron Beam Evaporator - Carbon) is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardement to a maximum temperature of 2000°C to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.
Options:
- Unit for vacuum isolation
- Filament kit
| TYPE | EBE-C |
| TEMPERATURE RANGE | up to 2300 °C |
| HEATING SYSTEM | e-beam heating bombardment | self-supported wire filament |
| BAKE-OUT TEMPERATURE | 200 °C |
| FLANGE SIZE | DN 40 | 63 (others on request) |
| MAX. OUTER DIAMETER | 38 mm (others on request) |
| MIN. UHV LENGTH | 180 mm |
| EVAPORATION FROM | rod |
| POWER SUPPLY | EBE-C-PS |
| MAX. VOLTAGE TARGET | up to 3 kV |
| MAX. EMISSION CURRENT | 300 mA |
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