EBE-Carbon (EBE-C)

The EBE-C is used for carbon doping in MBE applications. A pyrolytic graphite rod is heated by electron bombardement to a maximum temperature of 2000°C to evaporate elemental carbon of highest purity. The design prevents any ionized species leaving the source. The flux regulation is achieved by adjusting the emission current.


  • Unit for vacuum isolation
  • Filament kit

More technical specification can be found in the data sheet below

Available Data:

Data Sheet - EBE-C

Individual Effusion Cell Request