Linear Effusion Cell (L-EC)
Specifications
The Linear Effusion Cell (L-EC) is designed for continuous evaporation deposition on substrate tapes. According to requirements, the cell can be optimized regarding homogeneity, source material, width of the tape, etc. A water cooling around the heating system, allows processes at higher temperatures without affecting surroundings.
Options:
- Single filament
- Dual filament
| TYPE | L-EC |
| TEMPERATURE RANGE | 200 - 1400 °C |
| HEATING SYSTEM | wire filament | radiation heating |
| MAX. POWER | 1500 W (200 cc crucible) |
| BAKE-OUT TEMPERATURE | 250 °C |
| DESIGN | as specified |